✦ LIBER ✦
Prevention of hillock formation during micro-machining of silicon by using OTS-SAM and SiO2 coatings
✍ Scribed by T-S. Oh; H-J. Kim; D-E. Kim
- Publisher
- International Academy for Production Engineering
- Year
- 2010
- Tongue
- English
- Weight
- 629 KB
- Volume
- 59
- Category
- Article
- ISSN
- 0007-8506
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