Pressure regulating buffer seal

• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 134 KB
• Volume: 2002
• Category: Article
• ISSN: 1350-4789
• DOI: 10.1016/s1350-4789(02)10024-9

✦ Synopsis

A metal edge seal ring is formed in a trench made up of a large number of short, connected legs arranged in a perpendicular fashion. Metal is deposited in the trench, and because the metal comprises many short segments, rather than several long, straight sections, the subsequent chemical-mechanical polishing step does not cause significant cupping of the metal in the trench.