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Preparation of Y-Ba-Cu-O film on metal substrate with buffer layers deposited by ion beam assisted deposition

✍ Scribed by Xuming Xiong; Yueliang Zhou; Huibin Lü; Zhenghao Chen; Guozhen Yang

Publisher
SP Science China Press
Year
1997
Tongue
English
Weight
407 KB
Volume
40
Category
Article
ISSN
1674-7283

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Y 2 O 3 thin films were deposited by ion beam assisted deposition (IBAD) and the effects of fabrication parameters such as substrate temperature and ion energy on the structure, optical and electrical properties of the films were investigated. The results show that the deposited Y 2 O 3 films had le