๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Preparation of targets by a piezoelectric jet device

โœ Scribed by J. Van Audenhove; W. Habraken


Publisher
Elsevier Science
Year
1982
Weight
164 KB
Volume
200
Category
Article
ISSN
0167-5087

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


Preparation of piezoelectric ZnO thin fi
โœ Ken-ya Hashimoto; Syotaro Ogawa; Akinori Nonoguchi; Tatsuya Omori; Masatsune Yam ๐Ÿ“‚ Article ๐Ÿ“… 2000 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 231 KB ๐Ÿ‘ 1 views

This paper describes the deposition of high-quality zinc oxide (ZnO) thin film by reactive dc target-facing-type sputtering (DC-TFTS) using an arc killer that periodically applies a positive pulse to the negative dc discharge current. High-speed deposition of high-quality thin film, which is a merit