Preparation of superconducting molybdenum nitride MoNx (0.5⩽x⩽1) films with controlled composition

✍ Scribed by Kei Inumaru; Kazuya Baba; Shoji Yamanaka

• Book ID: 103886361
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 101 KB
• Volume: 383
• Category: Article
• ISSN: 0921-4526
• DOI: 10.1016/j.physb.2006.03.064

✦ Synopsis

We discuss here the composition control of MoN x thin films prepared by pulsed laser deposition under nitrogen radical irradiation. Xray photoelectron spectroscopy (XPS) was applied to the nitrogen content determination. The relative sensitivity factors of Mo and N in XPS were determined experimentally by using a bulk Mo 2 N sample as a standard. It was revealed that the nitrogen contents in MoN x films were well controlled from Mo 1 N 0.5 to Mo 1 N 1 by changing the film growth rates during the pulsed laser deposition.