Preparation of SiNB films by CVD techniques: effect of SiH4 addition to B2H6 and NH3 gas mixtures

✍ Scribed by Essafti, A.; Go´mez-Aleixandre, C.; Albella, J.M.

• Book ID: 122967201
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 453 KB
• Volume: 5
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/0925-9635(95)00465-3