✦ LIBER ✦
Preparation of silicon nitride films and investigation of their properties: F G Tomashpolskiy and R A Korkina, Electronic Technology, Scient Techn Collect, Radiocomponents, No 2, 1971, 63–68 (in Russian)
- Publisher
- Elsevier Science
- Year
- 1972
- Tongue
- English
- Weight
- 168 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0042-207X
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