Preparation of PZT Thin Films on Stainless Steel Using Electrochemical Reduction

✍ Scribed by Michio Koinuma; Hideki Ohmura; Yoshiro Fujioka; Yasumichi Matsumoto; Satoshi Yamada

• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 696 KB
• Volume: 136
• Category: Article
• ISSN: 0022-4596
• DOI: 10.1006/jssc.1997.7709

✦ Synopsis

PZT perovskite films which were strongly adhered to stainless steel were prepared by electrochemical reduction in solutions containing TiO 2؉ , ZrO 2؉ , and Pb 2؉ ions. The composition of the PZT films was easily controlled by the composition in the solution and the applied cathodic potential during the electrolysis. Heat treatment at 600 °C was necessary for crystallization, because the as-deposited oxide films were amorphous. Pb was deposited as a metal, while Zr and Ti were deposited as oxides and/or hydroxides during the electrolysis. The average of the dielectric constants of the PZT films prepared by the present method was more than 500.