✦ LIBER ✦
Preparation of Poly( N -alkylmethacrylamide) Langmuir−Blodgett Films for the Application to a Novel Dry-Developed Positive Deep UV Resist
✍ Scribed by Guo, Yinzhong; Feng, Fei; Miyashita, Tokuji
- Book ID
- 127057070
- Publisher
- American Chemical Society
- Year
- 1999
- Tongue
- English
- Weight
- 137 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0024-9297
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