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Preparation of photoresist polymer by a photoreactive monomer containing N,N-diethyldithiocarbamate group

✍ Scribed by Keiji Yamashita; Akio Nakano; Kazuichi Tsuda

Publisher: John Wiley and Sons
Year: 1988
Tongue: English
Weight: 455 KB
Volume: 35
Category: Article
ISSN: 0021-8995
DOI: 10.1002/app.1988.070350213

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