Preparation of piezoelectric ZnO thin fi
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Ken-ya Hashimoto; Syotaro Ogawa; Akinori Nonoguchi; Tatsuya Omori; Masatsune Yam
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Article
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2000
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John Wiley and Sons
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English
⚖ 231 KB
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This paper describes the deposition of high-quality zinc oxide (ZnO) thin film by reactive dc target-facing-type sputtering (DC-TFTS) using an arc killer that periodically applies a positive pulse to the negative dc discharge current. High-speed deposition of high-quality thin film, which is a merit