✦ LIBER ✦
Preparation of Organic Soluble Polyimides and Their Applications in KrF Excimer Laser LIGA Process
✍ Scribed by Yu-Sheng Hsieh; Chii-Rong Yang; Guang-Yeu Hwang; Yu-Der Lee
- Publisher
- John Wiley and Sons
- Year
- 2001
- Tongue
- English
- Weight
- 234 KB
- Volume
- 202
- Category
- Article
- ISSN
- 1022-1352
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