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Preparation of non-agglomerated Ta2O5powders by an aerosol process

✍ Scribed by J. M. Heintz; O. Amiel; R. Salmon

Publisher
Springer
Year
1990
Tongue
English
Weight
266 KB
Volume
9
Category
Article
ISSN
0261-8028

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## Abstract Tantalum‐doped indium tin oxide thin films were deposited by a cosputtering technique with an ITO target and a Ta~2~O~5~ target. The variations of microstructure, electrical and optical properties with substrate temperature and annealing temperature were investigated in some detail. Ta‐