✦ LIBER ✦
Preparation of nanocrystalline cubic silicon carbide thin films by hot-wire CVD at various filament-to-substrate distances
✍ Scribed by Akimori Tabata; Yusuke Komura
- Book ID
- 104093984
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 779 KB
- Volume
- 201
- Category
- Article
- ISSN
- 0257-8972
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