Preparation of molybdenum oxide film by
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D.J. Kwak; E. Kuantama; D.W. Han; Y.M. Sung
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Article
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2008
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Elsevier Science
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English
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In this work, molybdenum oxide (MoO 3 ) films were prepared by a magnetic null discharge (MND) sputtering system and some fundamental properties by XRD, XPS and SEM analysis were investigated. The initial and mean insulation resistances of the sample with MoO 3 film were about 1.4 Mฮฉ and 800 kฮฉ, res