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Preparation of In2O3 and tin-doped In2O3 films by a novel activated reactive evaporation technique

โœ Scribed by P. Nath; R.F. Bunshah


Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
235 KB
Volume
69
Category
Article
ISSN
0040-6090

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Superconducting YBa2Cu307\_ x (YBCO) thin films on MgO (100) substrates were successfully fabricated by a reactive evaporation method under oxygen plasma conditions. In this paper, details of the reactive evaporation method and the optimum preparation conditions are described. The superconducting tr