Preparation of highly (100)-oriented CeO2 films on polycrystalline Al2O3 substrates by laser chemical vapor deposition

✍ Scribed by Pei Zhao; Akihiko Ito; Rong Tu; Takashi Goto

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 353 KB
• Volume: 204
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2010.04.037

✦ Synopsis

CeO 2 films were prepared on Al 2 O 3 substrates by laser chemical vapor deposition at different laser power (P L ) up to 182 W. The (100)-oriented CeO 2 films were prepared at P L =101-167 W (T dep = 792-945 K). The texture coefficient (TC) of ( 200) reflection had a maximum of 6.7 at P L = 113 W (T dep = 836 K). The (100)oriented CeO 2 films consisted of granular grains and showed a columnar cross section. The deposition rates (R dep ) of (100)-oriented CeO 2 films showed a maximum of 43 μm h -1 at P L = 152 W (T dep = 912 K).