Preparation of Ge quantum crystallites embedded in a-SiNx matrix by the PECVD method

✍ Scribed by X.-X. Qu; K.-J. Chen; M.-X. Wang; Z.F. Li; W.-H. Shi; D. Feng

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 281 KB
• Volume: 90
• Category: Article
• ISSN: 0038-1098
• DOI: 10.1016/0038-1098(94)90118-x