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Preparation of Doped Spinel Cobalt Oxide Thin Films and Evaluation of their Thermal Stability

✍ Scribed by N. Bahlawane*; P. A. Premkumar; J. Feldmann; K. Kohse-Höinghaus

Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
435 KB
Volume
13
Category
Article
ISSN
0948-1907

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Preparation of Oriented Aluminum Nitride
Preparation of Oriented Aluminum Nitride Thin Films on Polyimide Films and Piezoelectric Response with High Thermal Stability and Flexibility
✍ M. Akiyama; Y. Morofuji; T. Kamohara; K. Nishikubo; Y. Ooishi; M. Tsubai; O. Fuk 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 469 KB 👁 2 views

## Abstract __c__‐Axis oriented aluminum nitride (AlN) thin films are successfully prepared on amorphous polyimide films by radiofrequency magnetron reactive sputtering at room temperature. Structural analysis shows that the AlN films have a wurtzite structure and consist of __c__‐axis oriented col