Effect of solvent on the preparation of
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Sang-Bae Jung; Jung-Ho Kim; Hong-Ryul Kim; Hyung-Ho Park
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Article
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2003
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Elsevier Science
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English
β 929 KB
SiO aerogel film has a promising property as intermetal dielectrics (IMD) for its low dielectric constant. 2 However, a stable and porous SiO aerogel film was not properly synthesized due to the rapid evaporation of 2 solvent during spin coating even in a solvent saturated atmosphere. So less evapor