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Preparation of Al2O3 film by sol–gel method on thermally evaporated Al film

✍ Scribed by Yang, Pengfei; Yao, Manwen; Xiao, Ruihua; Chen, Jianwen; Yao, Xi

Book ID: 122232740
Publisher: Elsevier Science
Year: 2014
Tongue: English
Weight: 923 KB
Volume: 107
Category: Article
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2014.04.008

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