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Preparation of 0.5 μm thick self-patternable PZT films by sol–gel procedure for applying to the micro-detection system

✍ Scribed by Jae-Seob Hwang; Woo Sik Kim; Hyung-Ho Park; Tae-Song Kim


Book ID
108411330
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
185 KB
Volume
70
Category
Article
ISSN
0167-9317

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