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Preparation and dielectric properties of surface modified TiO2/PEN composite films with high thermal stability and flexibility

✍ Scribed by Xu Huang, Zejun Pu, Lifen Tong, Zicheng Wang, Xiaobo Liu


Book ID
118801726
Publisher
Springer US
Year
2012
Tongue
English
Weight
731 KB
Volume
23
Category
Article
ISSN
0957-4522

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## Abstract __c__‐Axis oriented aluminum nitride (AlN) thin films are successfully prepared on amorphous polyimide films by radiofrequency magnetron reactive sputtering at room temperature. Structural analysis shows that the AlN films have a wurtzite structure and consist of __c__‐axis oriented col