Preparation and characterization of sprayed In2O3:Mo films

✍ Scribed by Prathap, P. ;Gowri Devi, G. ;Subbaiah, Y. P. V. ;Ganesan, V. ;Ramakrishna Reddy, K. T. ;Yi, J.

• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 272 KB
• Volume: 205
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.200778859

✦ Synopsis

Abstract

Transparent conducting oxides (TCO) play a major role in the area of thin film photovoltaics, flat panel displays, organic light emitting diodes and other optoelectronic devices. In order to improve the performance of a device, the TCO should have good optical transmittance as well as conductivity. In the present study, In~2~O~3~:Mo films have been grown by an economic and simple spray pyrolysis method with different molybdenum doping concentrations that vary in the range, 0–12 at% at a substrate temperature of 400 °C. The structural and morphological, electrical and optical behaviour of the as‐grown layers were studied. All the deposited layers showed a body‐centered cubic structure with a strong (222) orientation. In~2~O~3~:Mo films grown with Mo‐concentration of 6.0 at% had the maximum grain size of 90 nm. The average optical transmittance of the films was >85% in the visible region. The change of grain size, electrical resistivity, carrier mobility and density, optical band gap and figure of merit with doping concentration was reported and discussed. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)