Characteristics of sol-gel derived PZT t
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C. Lee; S. Kawano; T. Itoh; T. Suga
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Article
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1996
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Springer
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English
⚖ 1018 KB
The sol-gel derived PbZr0.53Ti0.4703 (PZT) films were fabricated on the bare Pt/Ti/SiO2/Si substrates or the same substrates coated by the PbTiO3 (PT) interlayers. The post-deposition annealing temperature and time were optimized when the PbO cover layers and PbO vapour-containing atmosphere were co