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Preparation and characterization of phosphorus-doped aluminum oxide thin films

✍ Scribed by M Tiitta; E Nykänen; P Soininen; L Niinistö; M Leskelä; R Lappalainen


Book ID
114067049
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
121 KB
Volume
33
Category
Article
ISSN
0025-5408

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