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Preparation and characterization of copolymers containing (+)-bornyl methacrylate and their racemate for positive-tone photoresist

โœ Scribed by Jui-Hsiang Liu; Jen-Chieh Shih; Chih-Hung Shih; Wei-Ting Chen

Publisher
John Wiley and Sons
Year
2001
Tongue
English
Weight
187 KB
Volume
81
Category
Article
ISSN
0021-8995

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tert-Butyl methacrylate (TBMA) was copolymerized with various comonomers that were selected from methyl methacrylate (MMA), n-butyl acrylate (NBA), acrylic acid (AA), and 2-hydroxyethyl methacrylate (HEMA). From film physical properties, poly(TBMA-co-HEMA) and poly(TBMA-co-AA-co-NBA), were selected