Preparation and Characterization of Ba(Zr$_{x}$Ti$_{1-x}$)O$_{3}$ Thin Films Using Reactive Sputtering Method

✍ Scribed by Kim, Jin Woong; Osumi, Tsuyoshi; Mastuoka, Masashi; Tai, Takeshi; Nishide, Masamichi; Funakubo, Hiroshi; Shima, Hiromi; Nishida, Ken; Yamamoto, Takashi

• Book ID: 126987061
• Publisher: Institute of Pure and Applied Physics
• Year: 2012
• Tongue: English
• Weight: 1004 KB
• Volume: 51
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/jjap.51.09la01