Preparation and characteristics of indium tin oxide (ITO) thin films at low temperature by r.f. magnetron sputtering

✍ Scribed by REN, B; LIU, X; WANG, M; XU, Y

• Book ID: 122340392
• Publisher: Nonferrous Metals Society of China
• Year: 2006
• Tongue: English
• Weight: 457 KB
• Volume: 25
• Category: Article
• ISSN: 1001-0521
• DOI: 10.1016/S1001-0521(07)60060-6