Preliminary results from key experiments on sources for EUV lithography

✍ Scribed by R. Lebert; L. Aschke; K. Bergmann; S. Düsterer; K. Gäbel; D. Hoffmann; P. Loosen; W. Neff; P. Nickles; O. Rosier; R. Poprawe; D. Rudolph; W. Sandner; R. Sauerbrey; G. Schmahl; H. Schwoerer; H. Stiehl; I. Will; C. Ziener

• Book ID: 114155330
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 49 KB
• Volume: 57-58
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(01)00533-0