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Preliminary evaluation of the influence of the temperature on the performance of a piezoresistive pressure sensor based on a-SiC film

✍ Scribed by M. A. Fraga; M. Massi; H. Furlan; I. C. Oliveira; L. A. Rasia; C. F. R. Mateus

Publisher: Springer-Verlag
Year: 2011
Tongue: English
Weight: 276 KB
Volume: 17
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-011-1244-8

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