✦ LIBER ✦
Preferred orientation, phase transition and hardness for sputtered zirconium nitride films grown at different substrate biases
✍ Scribed by Q.N. Meng; M. Wen; C.Q. Qu; C.Q. Hu; W.T. Zheng
- Book ID
- 104094959
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 830 KB
- Volume
- 205
- Category
- Article
- ISSN
- 0257-8972
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