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Prediction of surface and adhesion energies of nanoimprint lithography materials and anti-sticking layers by molecular dynamics simulation

โœ Scribed by Ji-Hoon Kang; Kwang-Seop Kim; Kyung-Woong Kim


Book ID
116245102
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
892 KB
Volume
258
Category
Article
ISSN
0169-4332

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