✦ LIBER ✦
Prediction of residual stress distribution in multi-stacked thin film by curvature measurement and iterative FEA
✍ Scribed by Hyeon Chang Choi; Jun Hyub Park
- Publisher
- Springer-Verlag
- Year
- 2005
- Tongue
- English
- Weight
- 577 KB
- Volume
- 19
- Category
- Article
- ISSN
- 1738-494X
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