Prediction of grain size, thickness and absorbance of nanocrystalline tin oxide thin film by Taguchi robust design

Tin dioxide thin-film gas sensor prepare

Tin dioxide thin-film gas sensor prepared by chemical vapour deposition: Influence of grain size and thickness on the electrical properties

✍ L. Bruno; C. Pijolat; R. Lalauze 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 405 KB

Tin dioxide films are elaborated by a chemical vapour deposition (CVD) method. An accurate control of deposition parameters (temperature, total pressure, duration) so that appropriate annealing conditions (duration, temperature) can be used to modify the structural properties of the films : grain si