Precision Sensors, Actuators and Systems

✍ Scribed by Toshio Fukuda, Fumihito Arai (auth.), Prof. H. S. Tzou, Prof. T. Fukuda (eds.)

• Publisher: Springer Netherlands
• Year: 1992
• Tongue: English
• Leaves: 477
• Series: Solid Mechanics and Its Applications 17
• Edition: 1
• Category: Library

✦ Synopsis

Research into and development of high-precision systems, microelectromechanical systems, distributed sensors/actuators, smart structural systems, high-precision controls, etc. have drawn much attention in recent years. These new devices and systems will bring about a new technical revolution in modern industries and impact future human life.
This book presents a unique overview of these technologies such as silicon based sensors/actuators and control piezoelectric micro sensors/actuators, micro actuation and control, micro sensor applications in robot control, optical fiber sensors/systems, etc.
These are four essential subjects emphasized in the book: 1. Survey of the (current) research and development; 2. Fundamental theories and tools; 3. Practical applications. 4. Outlining future research and development.

✦ Table of Contents

Front Matter....Pages i-xi
New Actuators for High-Precision Micro Systems....Pages 1-37
Micro Structures and Micro Actuators for Implementing Sub-millimeter Robots....Pages 39-72
Design, Modelling, and Control Strategies of a Three Degrees-of-Freedom VR Spherical Motor Part I: Reluctance Force Characterization....Pages 73-109
Design, Modelling, and Control Strategies of a Three Degrees-of-Freedom VR Spherical Motor Part II: Dynamic Modeling and Control....Pages 111-138
Micromachining of Piezoelectric Microsensors and Microactuators for Robotics Applications....Pages 139-174
Thin-Layer Distributed Piezoelectric Neurons And Muscles: Electromechanics and Applications....Pages 175-218
Optical Fiber Sensors and Systems....Pages 219-297
Design and Dexterous Control of Micromanipulator with Multiple Degrees of Freedom....Pages 299-344
A Three Degrees of Freedom Micro-Motion In-Parallel Actuated Manipulator....Pages 345-374
A Miniature Mobile Robot Using Piezo Elements....Pages 375-423
Distributed Piezoelectric Transducers Applied To Identification, Control, And Micro-Isolation....Pages 425-470
Back Matter....Pages 471-472

✦ Subjects

Electrical Engineering;Mechanical Engineering;Mechanics