<p><P>Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 10<SUP>5</SUP>, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrolog
Precision Motion Control: Design and Implementation
โ Scribed by Tan Kok Kiong PhD, Lee Tong Heng PhD, Dou Huifang PhD, Huang Sunan PhD (auth.)
- Publisher
- Springer London
- Year
- 2001
- Tongue
- English
- Leaves
- 244
- Series
- Advances in Industrial Control
- Category
- Library
No coin nor oath required. For personal study only.
โฆ Table of Contents
Front Matter....Pages i-xviii
Overview of Nanotechnology....Pages 1-11
Precision Tracking Motion Control....Pages 13-74
Automatic Tuning of Control Parameters....Pages 75-93
Co-Ordinated Motion Control of Gantry Systems....Pages 95-112
Geometrical Error Compensation....Pages 113-156
Electronic Interpolation Errors....Pages 157-171
Vibration Monitoring and Control....Pages 173-199
Other Engineering Aspects....Pages 201-212
Back Matter....Pages 213-232
โฆ Subjects
Control; Mechatronics
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