A structured approach to integrate MEMS
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M. Schlipf; S. Bathurst; K. Kippenbrock; S.-G. Kim; G. Lanza
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Article
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2010
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Elsevier
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English
β 620 KB
Even if the annual forecasted growth rates of MEMS and micro systems made by Precision Engineering look promising, up to now there have been few killer applications aside from acceleration sensors for airbags and ink jet printer heads.