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Precise X-ray relative measurement of lattice parameters of silicon wafers by multiple-crystal Bragg-case diffractometry. Computer simulation of the experiment

✍ Scribed by Cembali, F. ;Fabbri, R. ;Servidori, M. ;Zani, A. ;Basile, G. ;Cavagnero, G. ;Bergamin, A. ;Zosi, G.


Book ID
114500602
Publisher
International Union of Crystallography
Year
1992
Tongue
English
Weight
863 KB
Volume
25
Category
Article
ISSN
0021-8898

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