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Precise measurement of film thickness by line-focus-beam acoustic microscope : Kushibiki, J.; Ishikawa, T.; Chubachi, N. Ultrasonics International 87, Conference Proceedings, London (United Kingdom), 6–9 Jul. 1987. pp. 291–296. Butterworth and Co. (Publishers) Ltd., Guildford, Surrey (1987)

Publisher: Elsevier Science
Year: 1990
Weight: 165 KB
Volume: 23
Category: Article
ISSN: 0308-9126
DOI: 10.1016/0308-9126(90)91509-r

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