Precise etching of fused silica for refractive and diffractive micro-optical applications

✍ Scribed by K. Zimmer; R. Böhme

• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 514 KB
• Volume: 43
• Category: Article
• ISSN: 0143-8166
• DOI: 10.1016/j.optlaseng.2004.12.003