Precise determination of metal effective work function and fixed oxide charge in MOS capacitors with high-κ dielectric

✍ Scribed by M. Ťapajna; K. Hušeková; J.P. Espinos; L. Harmatha; K. Fröhlich

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 214 KB
• Volume: 9
• Category: Article
• ISSN: 1369-8001
• DOI: 10.1016/j.mssp.2006.10.012