Precipitation of antimony delta-doping layers in Si studied with channeling Rutherford backscattering spectrometry

✍ Scribed by L.J. van Ijzendoorn; C.W. Fredriksz; C. van Opdorp; D.J. Gravesteijn; D.E.W. Vandenhoudt; G.F.A. van de Walle; C.W.T. Bulle-Lieuwma

• Book ID: 113282912
• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 623 KB
• Volume: 64
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(92)95449-2