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Practical problems and solutions in spatially resolved spectroscopy

✍ Scribed by Ponnada A Narayana; Dye J Jensen; Edward F Jackson; William W Brey


Book ID
107798226
Publisher
Elsevier Science
Year
1988
Weight
1017 KB
Volume
79
Category
Article
ISSN
0022-2364

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Raman spectroscopy using a laser microprobe (also called micro-Raman) is becoming more widely used to study stress distribution in solids, particularly in micro-electronic device structures, because of its potential for high spatial resolution. Typically the diameter of the focused laser beam is 1 Β΅