Practical common-path heterodyne surface profiling interferometer with automatic focusing

✍ Scribed by Hongzhi Zhao; Rong Liang; Dacheng Li; Mang Cao

• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 148 KB
• Volume: 33
• Category: Article
• ISSN: 0030-3992
• DOI: 10.1016/s0030-3992(01)00035-4