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Pr2O3/Si(0 0 1) interface reactions and stability

✍ Scribed by Dieter Schmeißer; Jarek Dąbrowski; Hans-Joachim Müssig


Book ID
108215020
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
118 KB
Volume
109
Category
Article
ISSN
0921-5107

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The Pr2O3/Si(0 0 1) interface
✍ Dieter Schmeißer 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 525 KB

Praseodymium sequioxide (Pr 2 O 3 ) is among the most promising hetero-oxides which are treated as candidates of choice to replace SiO 2 as the gate dielectric material for sub-0.1mm CMOS technology. However, in order to enable the process integration the hetero-oxides require substantial characteri