Power laws for the spatial dependence of electrical parameters in the high-voltage capacitive RF sheath

✍ Scribed by Muller, H.; Howling, A.A.; Hollenstein, C.

• Book ID: 114559083
• Publisher: IEEE
• Year: 2000
• Tongue: English
• Weight: 158 KB
• Volume: 28
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.901258