✦ LIBER ✦
Power efficiency oriented optimal design of high density CCP and ICP sources for semiconductor RF plasma processing equipment
✍ Scribed by Long, M.
- Book ID
- 118233536
- Publisher
- IEEE
- Year
- 2006
- Tongue
- English
- Weight
- 682 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0093-3813
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