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Power Deposition Profiles in Magnetized Inductively Coupled Plasma

โœ Scribed by Lee, Ho-Jun; Lee, Hae June; Lim, Wang Sun; Whang, Ki-Woong


Book ID
121755171
Publisher
IEEE
Year
2008
Tongue
English
Weight
350 KB
Volume
36
Category
Article
ISSN
0093-3813

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