✦ LIBER ✦
Power dependence of gate oxide damage from electron shading effect in high-density-plasma metal etching
✍ Scribed by K Hashimoto; F Shimpuku; A Hasegawa; Y Hikosaka; M Nakamura
- Book ID
- 108389361
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 170 KB
- Volume
- 316
- Category
- Article
- ISSN
- 0040-6090
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